Mapping Elemental Composition at Fine Spatial Resolution

A surface's elemental composition needs to be mapped at very fine spatial resolution, distinguishing composition at individual small features rather than as one averaged bulk value.

References

• Goldstein, J.I., Newbury, D.E., Michael, J.R., et al. Scanning Electron Microscopy and X-Ray Microanalysis, 3rd ed. Plenum Press, 2003.