Sputtering and Secondary Ion Mass Analysis

How secondary ions sputtered from a surface are separated by mass-to-charge ratio to map elemental, isotopic, or molecular-fragment signatures, with adequate mass resolution needed to resolve interferences.

References

• Benninghoven, A. "Surface Analysis by Secondary Ion Mass Spectrometry (SIMS)." Surface Science Reports 18, no. 5-6 (1993): 161–336.