X-ray Fluorescence Spectroscopy

Non-destructively identifies and quantifies a sample's elemental composition by irradiating it with X-rays and reading the characteristic secondary X-rays each element emits in response.

References

• Goldstein, J.I., Newbury, D.E., Michael, J.R., et al. Scanning Electron Microscopy, 3rd ed. Plenum Press, 2003.