X-ray Reflectometry

Measures a thin film's thickness, density, and surface roughness without any physical contact, by directing X-rays at a shallow angle and analyzing exactly how the reflected intensity oscillates.

References

• Sinha, S.K., Sirota, E.B., Garoff, S., Stanley, H.B. "X-Ray and Neutron Scattering." Physical Review B 38, no. 4 (1988): 2297–2311.